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Development of Passive Check Valves for Piezoelectric Pump
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SUN Xiao-feng, YANG Li-qi, YU Wen-xin, ZHU Ming-wei, JIE Meng
Journal of Jilin Institute of Chemical Technology, 2018, 35(11): 22-24.
doi:10.16039/j.cnki.cn22-1249.2018.11.006
In order to make the piezoelectric pump work well, it is necessary to reasonably select the passive check valve for the pump. The pressure difference between the two sides of the valve body is very small when the piezoelectric vibrators are powered, so the opening pressure of the valve must be very low. In this paper, in the past research on piezoelectric pump, several commonly used passive check valves for piezoelectric pump, such as cantilever valve, plate valve, dual cantilever valve and bivalvular valve, are introduced. The structure characteristics of various valves and the advantages and disadvantages in the working process are analyzed, which provides reliable data for the further design of the piezoelectric pump in the selection of valve body.
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