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| Control Method for Piezoelectric Ceramic Fine Adjustment Leveling Platform |
| ZHANG Xingyao1,KONG Fanxing2*
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| (1.School of Information and Control Engineering, Jilin Institute of Chemical Technology, Jilin City 132022,China;2.School of Mechanical and Electrical Engineering, Jilin Institute of Chemical Technology,Jilin City 132022,China) |
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Abstract A control method for piezoelectric ceramic fine adjustment leveling platform was proposed to address the leveling issue during the measurement process of the Wolter-I type optical spindle. A mathematical model was established for the non-horizontal state, and data on the tilts of three edges—two longitudinal and one transverse were collected to determine the highest point. An automatic leveling method was proposed, combining the angle error method and the highest point tracking method. Comparative experiments were conducted between feed forward compensation control based on a hysteresis inverse model and composite control based on fuzzy PID feedback control and feed forward control, targeting errors caused by the hysteresis characteristic of piezoelectric ceramics and external disturbances. The experiments showed that the displacement control accuracy of the composite control was 72% higher compared to single feed forward control. In the leveling simulation experiments, the composite control was applied to the micro-leveling system. The results showed that the leveling resolution can reach 0.000 1°, and the error between the actual angle and the ideal angle is less than 0.000 1°.
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Published: 05 July 2025
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