Abstract
ZnO films were prepared on quartz substrates by magnetron sputtering, the film structure was characterized by XRD, and the optical properties of the films were characterized by photoluminescence and transmission spectra, and the effect of the sputtering gas flow ratio on the optical properties of the films was discussed.The results show that when the Ar/O2 is 1/0.05, the visible ultraviolet light is observed and the band gap width is 3.310 eV.
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