Abstract
[Fe/Pt]n films were deposited on Si substrate using dc magnetron sputtering. The composition, structure and magnetic properties of the films were analyzed by X-ray fluorescence spectrometer (XRF), X-ray diffractometer (XRD) and vibrating sample magnetometer (VSM). The results show that [Fe/Pt]n thin films have been obtained by rapid heat treatment at 600 oC. For [Fe (x nm) / Pt (0.5 nm)]n films, as Fe layer thickness is 0.7 nm, the order degree of the film is the largest, in-plane and out-of-plane coercivities are the highest. For [Fe/Pt]n films with different modulation periods, the order degree increases first and then decreases. The in-plane coercivity is higher than that of out-of-plane. When the modulation period is 2.4 nm, in-plane coercivity of the film is the largest.
|